Modeling of Electromechanical Characteristics of Piezoresonance Pressure Sensors with Membrane Control of the Interelectrode Gap of a Piezoelectric Element
Keywords:overpressure sensor, piezoelectric element, excitation in the gap, elastic element, membrane, 3D model, numerical modeling, medical applications, sphygmographic signal, pulse wave
The paper considers the issues of increasing the simulation accuracy of perspective piezoresonance overpressure sensors with membrane control of the piezoelectric element interelectrode gap. A comparative analysis of elastic membrane elements characteristics made of alloys two different types, calculated by the existing methods for flat and corrugated membranes, and obtained by simulation in the COMSOL Multiphysics system is carried out. It is shown that the existing analytical methods for calculating membrane elements are of an approximate nature and allow only rough estimates to be obtained, since they do not take into account all the structural features of the elastic elements and are adapted to the experimental designs of sensors with a specific geometry. The elastic characteristics of the measuring diaphragm of pressure sensors with a variable interelectrode gap of excitation are calculated. The capacitance of the interelectrode gap of the membrane pressure sensor is determined. Numerical simulation of the stressed-deformed state of the corrugated membrane in the COMSOL Multiphysics software package was carried out. The operating characteristics of the piezoresonance sensor of excess pressure with variable inter electrode gap of excitation are studied. The developed three-dimensional model of the sensor of excessive pressure for medical applications makes it possible to significantly improve the accuracy of characteristics calculations of the stress-strain state of elements during their micro-displacements, remove the limitations on the structural features of the membrane and its attachment methods, and significantly shorten the time and costs for developing measuring transducers. The obtained results provide ample opportunities to optimize the design of the sensor, improve its accuracy and reduce the impact on it of destabilizing environmental factors.
Шарапов В.М. Пьезоэлектрические датчики / Шарапов В.М., Мусиенко М.П., Шарапова Е.В. – М.: Техносфера, 2006 – 628 с.
Джексон, Р.Г. Новейшие датчики. Справочник пер. с англ. – М.: Техносфера, 2007. – 380 с.
Патент RU2430344 МПК G01L9/08 Датчик давления / Хильченко Г.Л., Таранчук А.А, Пидченко С.К. - 2011. – Бюл № 27.
A. Taranchuk Applied Measurement System. Design Methodology to Construct Information Measuring Systems Built on Piezoresonant Mechanotrons with a Modulated Interelectrode Gap/ A. Taranchuk, S. Pidchenko // Published by InTech, Janeza Trdine 9, 51000 Rijeka, Croatia, 2012, Сhapter 12, PP. 229-258. - ISBN: 978-953-51-0103-1.13.
Davies JM, Bailey MA, Griffin KJ, Scott DJ: Pulse wave velocity and the non-invasive methods used to assess it: Complior, SphygmoCor, Arteriograph and Vicorder. Vascular 2012, Vol. 20. – Pp. 342–349.
Андреева Л.Е. Упругие элементы приборов. – М.: Машиностроение, I981. – 392 с.
Renу de Borst. Nonlinear Finite Element Analysis of Solids and Structures / Renу de Borst, Mike A. Crisfield, Joris J. C. Remmers, Clemens V. Verhoosel // John Wiley & Sons, 2012. – 544 р.
COMSOL Multiphysics User’s Guide, 2012 COMSOL. – 1234 р.
P.M. Kurowski. Engineering analysis with solidworks simulation / SDC Publications, 2018. – 596 p.
N. Marsi. The mechanical and electrical effects of MEMS capacitive pressure sensor based 3C-SiC for extreme temperature / Marsi, N.; Majlis, B.Y.; Hamzah, A.A.; Mohd-Yasin, F. // Hindawi publishing corporation, 2014, Eng. 2014, 2014, 715167. – 8 p.
Sharapov V.M., Musienko M.P. and Sharapova E.V. (2006) Pezoelektricheskie datchiki [Piezoelectric sensors]. Moskov, Tehnosfera, 628 p.
Dzhekson R.G. (2007) Noveyshie datchiki [The newest sensors], Moskov, Tehnosfera, 380 p.
Hilchenko G., Pidchenko S. and Taranchuk A. (2011) Pressure sensor, Patent RU2430344.
Taranchuk A. and Pidchenko S. (2012) Design Methodology to Construct Information Measuring Systems Built on Piezoresonant Mechanotrons with a Modulated Interelectrode Gap. Applied Measurement Systems. DOI: 10.5772/35746
Davies J.M., Bailey M.A., Griffin K.J. and (2012) Pulse wave velocity and the non-invasive methods used to assess it: Complior, SphygmoCor, Arteriograph and Vicorder. Vascular, Vol. 20, Iss. 6, pp. 342-349. DOI: 10.1258/vasc.2011.ra0054
Andreeva L.E. (1981) Uprugie elementyi priborov [Elastic elements of devices]. Moskov, Mashinostroenie, 392 p.
Borst R.d., Crisfield M.A., and Verhoosel C.V. (2012) Non-Linear Finite Element Analysis of Solids and Structures. DOI: 10.1002/9781118375938
COMSOL Multiphysics User’s Guide, 1234 р.
Kurowski P.M. (2018) Engineering analysis with solidworks simulation, SDC Publications, 596 p.
Marsi N., Majlis B.Y., Hamzah A.A. and Mohd-Yasin F. (2014) The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature. Journal of Engineering, Vol. 2014, pp. 1-8. DOI: 10.1155/2014/715167
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