Suppression of bulk waves in surface acoustic wave filter

Abstract

Introduction. One of the dominant second order effects in devices based on surface acoustic waves (SAW) is the excitation of parasitic bulk acoustic waves (BAW). Attention is drawn to the lack of effectiveness of traditional BAW suppression ways.
Traditional ways of suppressing the bulk acoustic waves. Provides an overview of how suppression of parasitic BAW to SAW filters. One way allows to reach a record level of BAW suppression (−65 dB) due to the significant mechanical weakening of the acoustic line of the filter.
Narrowband surface acoustic wave filter. It is found that in the SAW filter with an extremely high level of out-of-band suppression (−72 dB) traditional ways do not provide the required level of suppression of BAW.
Wave heterogeneity of special shape. Tested the effectiveness of the authors proposed way of BAW suppression in a narrow-band SAW filter with an extremely high level of out-of-band suppression. A deep closed groove which is cut in the lower surface of the acoustic line of filter reduces the level of BAW to −70 dB, and the strength of the acoustic line of filter is almost not reduced.
The dependence of suppression the bulk acoustic waves from the parameters of the wave heterogeneity. The dependence of the relative level (B) of suppression the slow quasi-shear bulk acoustic waves from the depth of the closed groove was investigated. It was found a monotonic increase in the level of B with increasing groove depth. Level B = −70 dB was obtained when the thickness of the gap between the bottom of the groove and the working surface of the acoustic line was (for different filter samples).
Conclusion. The effectiveness of the authors proposed way of suppression the slow quasi-shear BAW in SAW filters is proved. A deep closed groove which is cut into the bottom surface of the acoustic line of filter can suppress slow quasi-shear BAW to a level of −70 dB.