The excitation of surface acoustic waves in the IDT with fused quartz ZnO films and the crystalline state films

Authors

  • G. A. Galina Kiev Politechnic Institute, Kiev
  • G. I. Kal'naya Kiev Politechnic Institute, Kiev
  • N. M. Prishchepa Kiev Politechnic Institute, Kiev

Keywords:

zinc oxide film, crystalline state, SAW transducers, surface acoustic waves

Abstract

The effect of the crystalline state of zinc oxide films on the effectiveness of SAW converters based on them.

Author Biographies

G. A. Galina, Kiev Politechnic Institute, Kiev

Galina G. A.

G. I. Kal'naya, Kiev Politechnic Institute, Kiev

Kal'naya G. I.

N. M. Prishchepa, Kiev Politechnic Institute, Kiev

Prishchepa N. M.

References

Хикернелл Ф. Преобразователи поверхностных акустических волн на тонких пленках окиси цинка // ТИИЭР. 1976. Т. 64, № 5. С. 70-76.

Yamam oto Т., Shiosaki Т., K aw abata A. Characterization of ZnO piezoelectric films prepared by rf planar – magnetron sputtering // J. Appl. Phys. 1980. Vol. 51,N 6. P. 3113.

Kino G. S., Wagers R. S. Theory of interdidital couplers on nonpiezoelectric substrates // Ibid. 1973. Vol. 44. P. 1480-1483.

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Issue

No. 25 (1988)

Section

Articles