Suppression of bulk waves in surface acoustic wave filter

Authors

DOI:

https://doi.org/10.20535/RADAP.2016.67.65-70

Keywords:

interdigital transducer, IDT, bulk acoustic waves, BAW, parasitic BAW suppression ways, slow quasi-shear BAW, dispersion of the BAW, wave heterogeneity, closed deep groove

Abstract

Introduction. One of the dominant second order effects in devices based on surface acoustic waves (SAW) is the excitation of parasitic bulk acoustic waves (BAW). Attention is drawn to the lack of effectiveness of traditional BAW suppression ways.
Traditional ways of suppressing the bulk acoustic waves. Provides an overview of how suppression of parasitic BAW to SAW filters. One way allows to reach a record level of BAW suppression (−65 dB) due to the significant mechanical weakening of the acoustic line of the filter.
Narrowband surface acoustic wave filter. It is found that in the SAW filter with an extremely high level of out-of-band suppression (−72 dB) traditional ways do not provide the required level of suppression of BAW.
Wave heterogeneity of special shape. Tested the effectiveness of the authors proposed way of BAW suppression in a narrow-band SAW filter with an extremely high level of out-of-band suppression. A deep closed groove which is cut in the lower surface of the acoustic line of filter reduces the level of BAW to −70 dB, and the strength of the acoustic line of filter is almost not reduced.
The dependence of suppression the bulk acoustic waves from the parameters of the wave heterogeneity. The dependence of the relative level (B) of suppression the slow quasi-shear bulk acoustic waves from the depth of the closed groove was investigated. It was found a monotonic increase in the level of B with increasing groove depth. Level B = −70 dB was obtained when the thickness of the gap between the bottom of the groove and the working surface of the acoustic line was (for different filter samples).
Conclusion. The effectiveness of the authors proposed way of suppression the slow quasi-shear BAW in SAW filters is proved. A deep closed groove which is cut into the bottom surface of the acoustic line of filter can suppress slow quasi-shear BAW to a level of −70 dB.

Author Biographies

E. A. Nelin, National Technical University of Ukraine, Kyiv Politechnic Institute, Kiev

Nelin E. A., Doc. of Sci (Tech.), Professor

Yu. V. Nepochatykh, National Technical University of Ukraine, Kyiv Politechnic Institute, Kiev

Nepochatykh Yu. V., Senior Lecturer

References

Перелiк посилань

Morgan D. Surface Acoustic Wave Filters With Applications to Electronic Communications and Signal Processing. Second edition / D. Morgan. — Amsterdam, … Tokyo: Elsevier, 2007. — 429 р.

Warder P. Selecting filters for challenging mobile applications worldwide / P. Warder, N. Layus // Microwave Journal. — 2013. — № 11. — P. 96–106.

Cular S. Designs and Applications of Surface Acoustic Wave Sensors for Biological and Chemical Sensing and Sample Handling: Dissertation for the degree of doctor of philosophy / Cular Stefan; University of South Florida, 2008. — 251 р., http://scholarcommons.usf.edu/etd/196.

Wen C. Study on architecture and performances of dual track SAW device / C. Wen, Y. Ju, D. Yan et al. // Future Intelligent Information Systems. Edited by Zeng D. — Berlin: Springer, 2011. — Vol. 1. — P. 143–149.

Hashimoto Ken-ya. Surface Acoustic Wave Devices in Telecommunications: Modeling and Simulation / Ken-ya Hashimoto. — N. Y.: Springer, 2000. — 330 p.

Дмитриев В. В. Интегральные пьезоэлектрические устройства фильтрации и обработки сигналов: справ. пособие / В. В. Дмитриев, В. Б. Акпамбетов, Е. Г. Бронникова и др.; под ред. Б. Ф. Высоцкого, В. В. Дмитриева. — М.: Радио и связь, 1985. — 176 с.

Wagers R. S. Plate mode coupling in acoustic surface wave devices / R. S. Wagers R. S. // IEEE Transactions on Sonics and Ultrasonics. — 1976. — Vol. SU-23, № 2. — P. 113–127.

Авторское свидетельство СССР № 930587, МПК H03H 9/25. Фильтр на поверхностных акустических волнах / З. С. Василина, Е. Г. Левчук, Л. М. Смеркло. — Опубл. 23.05.1982.

Авторское свидетельство СССР № SU 1565326 A1, МПК H03H 9/00. Устройство на поверхностных акустических волнах / Ю. В. Бельский. — Опубл. 28.01.1988.

Авторское свидетельство СССР № 537438, МПК H03H 9/00. Фильтр ультразвуковых поверхностных волн / Т. С. Ившина, Ю. А. Клешнев. — Опубл. 30.11.1976.

Авторское свидетельство СССР № SU 1316533 A1, МПК H03H 9/25. Пьезоэлектрическое устройство на поверхностных акустических волнах / Ю. В. Лакиза, А. А. Малащенко, А. В. Мезенов, И. П. Овсищер, В. И. Шепшелей. — Опубл. 12.07.1985.

Patent USA no. US3887887 A, Int. Cl. H03H 9/30, 9/32, 9/26; U.S. Cl. 333/30 R, 29/25.35, 29/594, 7 310/95, 333/72. Acoustic bulk mode suppressor / R. S. Wagers, M. J. Birch, C. S. Hartmann, D. F. Weirauch. — publication date 03.06.1975.

Заявка Японии № 56-36807, МПК H03H 3/08. Способ изготовления монокристаллической подложки из танталата лития для элемента, передающего упругие поверхностные волны / Т. Сабиура. — Опубл. 26.08.1981.

Patent USA, no. US4388600 A, Int. Cl. H03H 9/25, 9/02, 3/08; U.S. Cl. 333/151, 310/313.00R, 333/194. Surface acoustic wave device / K. Wakino, M. Kadota, T. Sato. — publication date 14.06.1983.

Авторское свидетельство СССР № SU 1457788 A1, МПК H03H 9/64. Фильтр на поверхностных акустических волнах / Ю. М. Брюханов, А. Г. Герман, К. В. Николаенко. — Опубл. 08.04.1987.

Авторское свидетельство СССР № SU 1780146 A1, МПК H03H 9/46. Фильтр на поверхностных акустических волнах / А. В. Груздев. — Опубл. 07.12.1992.

Слободник Э., Сабо Т., Лейкер К. Миниатюрные фильтры на поверхностных акусти ческих волнах / Э. Слободник, Т. Сабо, К. Лейкер // ТИИЭР. — 1979. — Т. 67, № 1. — С. 147–166.

Сибаяма К., Яманути К., Сато Х., Мэгуро Т. Оптимально повёрнутый Y-срез кристалла LiNbO3 для подложек фильтров на поверхностных акустических волнах / К. Сибаяма, К. Яманути, Х. Сато, Т. Мэгуро // ТИИЭР. — 1976. — Т. 64, № 5. — С. 27–29.

Патент Российской Федерации № RU 2054791 C1, МПК H03H 9/64. Фильтр на поверхностных акустических волнах / А. А. Вернигор, Е. А. Нелин, Ю. В. Непочатых, В. И. Попсуй. — Опубл. 20.02.1996.

References

Morgan D. (2007) Surface Acoustic Wave Filters With Applications to Electronic Communications and Signal Processing. Second edition. Amsterdam, Tokyo, Elsevier, 429 p. DOI: 10.1016/b978-012372537-0/50001-7

Warder P. (2013) Selecting filters for challenging mobile applications worldwide. Microwave Journal, No. 11, pp. 96-106.

Cular S. (2008) Designs and Applications of Surface Acoustic Wave Sensors for Biological and Chemical Sensing and Sample Handling. Dr. philosophy diss. University of South Florida, 251 p.

Wen C., Ju Y., Yan D., Kang Y., Liu L. and Li W. (2011) Study on architecture and performances of dual track SAW device. Future Intelligent Information Systems. Edited by Zeng D., Berlin, Springer, vol. 1, pp. 143-149. DOI: 10.1007/978-3-642-19706-2_19

Hashimoto Ken-ya (2000) Surface Acoustic Wave Devices in Telecommunications: Modeling and Simulation. N. Y., Springer, 330 p. DOI: 10.1007/978-3-662-04223-6_8

Dmitriev V. V. ed., Akpambetov V. B., Bronnikova E. G. and Vysotskii B. F. ed. (1985) Integral'nye p'ezoelektricheskie ustroistva fil'tratsii i obrabotki signalov [Integral piezoelectric devices filtering and signal processing]. Moscow, Radio i svyaz' Publ., 176 p.

Wagers R. (1976) Plate mode coupling in acoustic surface wave devices. IEEE Transactions on Sonics and Ultrasonics, Vol. 23, No. 2. pp. 113-127. DOI: 10.1109/t-su.1976.30848

Vasilina Z. S., Levchuk E. G. and Smerklo L. M. (1982) Fil'tr na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave filter]. Patent SU 930587.

Bel'skii Yu. V. (1988) Ustroistvo na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave device]. Patent SU 1565326 A1.

Ivshina T. S. and Kleshnev Yu. A. (1976) Fil'tr ul'trazvukovykh poverkhnostnykh voln [Filter ultrasonic surface waves]. Patent SU 537438.

Lakiza Yu. V., Malashchenko A. A., Mezenov A. V., Ovsishcher I. P. and Shepshelei V. I. (1985) P'ezoelektricheskoe ustroistvo na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave piezoelectric device]. Patent SU 1316533 A1.

Wagers R. S., Birch M. J., Hartmann C. S. and Weirauch D. F. (1975) Acoustic bulk mode suppressor. Patent US 3887887 A.

Sabiura T. (1981) Sposob izgotovleniya monokristallicheskoi podlozhki iz tantalata litiya dlya elementa, peredayushchego uprugie poverkhnostnye volny [The way of manufacturing a single crystal substrate of lithium tantalate for element which transmit elastic surface waves]. Patent JP 56-36807.

Wakino K., Kadota M. and Sato T. (1983) Surface acoustic wave device. Patent US 4388600 A.

Bryukhanov Yu. M., German A. G. and Nikolaenko K. V. (1987) Fil'tr na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave filter]. Patent SU 1457788 A1.

Gruzdev A. V. (1992) Fil'tr na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave filter]. Patent SU 1780146 A1.

Slobodnik A. J., Szabo T. I. and Laker K. R. (1979) Miniature surface-acoustic-wave filter. Proceedings of the IEEE, Vol. 67, No. 1, pp. 129-146. DOI: 10.1109/PROC.1979.11209

Shibayama K., Yamanouchi K., Sato H. and Meguro T. (1976) Optimum cut for rotated Y-cut LiNbO3 crystal used as the substrate of acoustic-surface-wave filters. Proceedings of the IEEE, Vol. 64, No. 5, pp. 595-597. DOI: 10.1109/proc.1976.10181

Vernigor A. A., Nelin E. A., Nepochatykh Yu. V. and Popsui V. I. (1996) Fil'tr na poverkhnostnykh akusticheskikh volnakh [Surface acoustic wave filter]. Patent RU 2054791 C1.

Published

2016-12-30

How to Cite

Нелін, Є. А. and Непочатих, Ю. В. (2016) “Suppression of bulk waves in surface acoustic wave filter”, Visnyk NTUU KPI Seriia - Radiotekhnika Radioaparatobuduvannia, 0(67), pp. 65-70. doi: 10.20535/RADAP.2016.67.65-70.

Issue

Section

Functional Electronics. Micro- and Nanoelectronic Technology