Research of concomitant shock-vibration noise of a piezoelectric motor in the mode of micro and nano speed
DOI:
https://doi.org/10.20535/RADAP.2019.78.67-73Keywords:
piezoelectric motor, velocity, vibration, micron, nano-rangeAbstract
This work is devoted to improvement of methods for controlling the speed of piezoelectric motors in the micro and nano-bands. Based on the physical principles of the piezoelectric motor, taking into account the specifics of control signals and feedback, investigated the shock-vibration effects for linear piezoelectric motor by quasirezonance type under different speed control modes in the range of 0,1 μm/s...10 mm/s. Proposed speed control algorithms, which ensured a decrease of 2...10 times the shock-vibration effect in comparison with pulse-width modulation. It is established that in the speed microwave range the most effective are combined algorithms that combine as elements of continuous control by frequency response scanning for engine, and pulse – by internal modulation of excitation frequency. The paper shows that the most effective control in nano-band is frequency control with a fixed duration of control pulse – a nanocorrect engine. The obtained results allow to provide a control range of speed (5 orders) for linear piezoelectric motor taking into account it`s operating conditions in a micromanipulation system, as well as provide opportunities for use linear piezoelectric motors of quasi-resonance type in robotic and manipulation systems in micro and nano-range and further improvement in terms of miniaturization and increased accuracy.
References
Wang D.H., Yang Q. and Dong H.M. (2013) A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing. IEEE/ASME Transactions on Mechatronics, Vol. 18, Iss. 1, pp. 138-147. DOI: 10.1109/tmech.2011.2163200
Amin-Shahidi D. and Trumper D.L. (2014) Design and control of a piezoelectric driven reticle assist device for prevention of reticle slip in lithography systems. Mechatronics, Vol. 24, Iss. 6, pp. 562-571. DOI: 10.1016/j.mechatronics.2014.03.001
Kongthon J. and Devasia S. (2013) Iterative Control of Piezoactuator for Evaluating Biomimetic, Cilia-Based Micromixing. IEEE/ASME Transactions on Mechatronics, Vol. 18, Iss. 3, pp. 944-953. DOI: 10.1109/tmech.2012.2194302
Gu G., Zhu L., Su C. and Ding H. (2013) Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation. IEEE/ASME Transactions on Mechatronics, Vol. 18, Iss. 5, pp. 1459-1471. DOI: 10.1109/tmech.2012.2203315
Gu G., Zhu L., Su C., Ding H. and Fatikow S. (2016) Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey. IEEE Transactions on Automation Science and Engineering, Vol. 13, Iss. 1, pp. 313-332. DOI: 10.1109/tase.2014.2352364
Alonso-delPino M., Jung-Kubiak C., Reck T., Llombart N. and Chattopadhyay G. (2019) Beam Scanning of Silicon Lens Antennas Using Integrated Piezomotors at Submillimeter Wavelengths. IEEE Transactions on Terahertz Science and Technology, Vol. 9, Iss. 1, pp. 47-54. DOI: 10.1109/tthz.2018.2881930
Petrenko S.F. (2002) P'ezoelektricheskii dvigatel' v priborostroenii [A piezoelectric motor in instrument]. Korniichuk Publ., 96 p.
Digital International Technology. Available at: www.dtimotors.com
Lavrinenko V. V. (2015) Printsipy postroeniya p'ezoelektricheskikh motorov. Osnovy teorii i realizatsiya [The principles of construction of piezoelectric motors. Fundamentals of theory and implementation]. Lambert, 227 p.
Piezo Technologies. Available at: piezotech.com.ua
Halchenko V.Y., Filimonov S.A., Batrachenko A.V. and Filimonova N.V. (2018) Increase the Efficiency of the Linear Piezoelectric Motor. Journal of Nano- and Electronic Physics, Vol. 10, Iss. 4, pp. 04025-1. DOI: 10.21272/jnep.10(4).04025
Petrenko S., Omelyan A., Antonyuk V. and Novakovsky O.G. (2018) Piezoelectric motor control system. Bulletin of Kyiv Polytechnic Institute. Series Instrument Making, Iss. 55(1), pp. 5-10. DOI: 10.20535/1970.55(1).2018.135857
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