Svoistva plenok okisi tsinka na podlozhkakh iz plavlenogo kvartsa [The properties of zinc oxide films on substrates made of fused quartz]

Authors

  • V. P. Pogrebnyak Kiev Politechnic Institute, Kiev
  • A. V. Mashinets Kiev Politechnic Institute, Kiev
  • S. V. Pashkevich Kiev Politechnic Institute, Kiev
  • V. A. Shatalov Kiev Politechnic Institute, Kiev

Keywords:

Svoistva plenok okisi tsinka na podlozhkakh iz plavlenogo kvartsa [The properties of zinc oxide films on substrates made of fused quartz] Pogrebnyak V. P. Mashinets A. V. Pashkevich S. V. Shatalov V. A. The results of the study of layered systems thin fi

Abstract

The results of the study of layered systems thin film of zinc oxide - not the piezoelectric substrate made of fused quartz. The dependence of the electromechanical coupling coefficient and the velocity of propagation of surface acoustic waves on the value normalized to the wavelength of the film thickness of zinc oxide. The experimental data.

Author Biographies

V. P. Pogrebnyak, Kiev Politechnic Institute, Kiev

Pogrebnyak V. P.

A. V. Mashinets, Kiev Politechnic Institute, Kiev

Mashinets A. V.

S. V. Pashkevich, Kiev Politechnic Institute, Kiev

Pashkevich S. V.

V. A. Shatalov, Kiev Politechnic Institute, Kiev

Shatalov V. A.

References

Гранкия И. М., Лопушенко В. К., Кальная Г. И. Технология получения высокоориентированных тонких пленок окиси цинка. – Микроминиатюризация

радиоэлектронных устройств, 1979, вып. 2, с. 75-79.

Kino G. S., Wagers R. S. Theori of interdigital couplers of nonpizoelectric substrates. – J. Appl. Phys. 1973, April, vol. 44, No. 4, p. 1480-1488.

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Issue

No. 20 (1983)

Section

Articles