PREPARATION OF ZnO THIN FILMS FOR SURFACE ACOUSTIC WAVE DEVICES

Authors

  • L. M. Grankin Kiev Politechnic Institute, Kiev
  • G. I. Kalnaja Kiev Politechnic Institute, Kiev
  • V. K. Lopushenko Kiev Politechnic Institute, Kiev

Abstract

The microstructure of sputtered ZnO films used for the generation of acoustic
surface waves has been examined.

Author Biographies

L. M. Grankin, Kiev Politechnic Institute, Kiev

Grankin L M.

G. I. Kalnaja, Kiev Politechnic Institute, Kiev

Kalnaja G. I. ,

V. K. Lopushenko, Kiev Politechnic Institute, Kiev

Lopushenko V. К.

References

Хикернелл Ф. Преобразователи поверхностных волн на .тонких пленках окиси цинка.— ТИИЭР, № 5, 1976, с. 70—76.

Hickernel F. DS-triode sputteredzinc oxide surface elastic wave transducer.— J. Appl. Phys. 1973, March, vol. 44,p. 1061— 1071.

Downloads

Issue

No. 18 (1981)

Section

Articles