TECHNIQUE OF NON-ORGANIC PHOTOLITHOGRAPHY

Authors

  • А. V. Kolomejko Kiev Politechnic Institute, Kiev
  • V. С. Lopuchenko Kiev Politechnic Institute, Kiev
  • V. A. Poddubnyj Kiev Politechnic Institute, Kiev

Abstract

The method of non-organic photolithography is considered and results of experiment are given.

Author Biographies

А. V. Kolomejko, Kiev Politechnic Institute, Kiev

 Kolomejko А. V.,

V. С. Lopuchenko, Kiev Politechnic Institute, Kiev

Lopuchenko V. С., 

V. A. Poddubnyj, Kiev Politechnic Institute, Kiev

Poddubnyj V. A.,

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Issue

No. 16 (1979)

Section

Articles