PREPARATION OF ZnO THIN FILMS FOR SURFACE ACOUSTIC WAVE DEVICES

Authors

  • L. M. Grankin Kiev Politechnic Institute, Kiev
  • G. I. Kalnaja Kiev Politechnic Institute, Kiev
  • V. K. Lopushenko Kiev Politechnic Institute, Kiev

Abstract

The microstructure of sputtered ZnO films used for the generation of acoustic
surface waves has been examined.

Author Biographies

  • L. M. Grankin, Kiev Politechnic Institute, Kiev
    Grankin L M.
  • G. I. Kalnaja, Kiev Politechnic Institute, Kiev

    Kalnaja G. I. ,

  • V. K. Lopushenko, Kiev Politechnic Institute, Kiev

    Lopushenko V. К.

References

Хикернелл Ф. Преобразователи поверхностных волн на .тонких пленках окиси цинка.— ТИИЭР, № 5, 1976, с. 70—76.

Hickernel F. DS-triode sputteredzinc oxide surface elastic wave transducer.— J. Appl. Phys. 1973, March, vol. 44,p. 1061— 1071.

Downloads

Issue

No. 18 (1981)

Section

Articles