TECHNIQUE OF NON-ORGANIC PHOTOLITHOGRAPHY

Authors

  • А. V. Kolomejko Kiev Politechnic Institute, Kiev
  • V. С. Lopuchenko Kiev Politechnic Institute, Kiev
  • V. A. Poddubnyj Kiev Politechnic Institute, Kiev

Abstract

The method of non-organic photolithography is considered and results of experiment are given.

Author Biographies

  • А. V. Kolomejko, Kiev Politechnic Institute, Kiev
     Kolomejko А. V.,
  • V. С. Lopuchenko, Kiev Politechnic Institute, Kiev
    Lopuchenko V. С., 
  • V. A. Poddubnyj, Kiev Politechnic Institute, Kiev

    Poddubnyj V. A.,

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Issue

No. 16 (1979)

Section

Articles